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Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode: Journal of Applied Physics: Vol 125, No 6
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Section III Sputtering © 1998, Angus Rockett. - ppt download
PDF) Distribution of Sputtered Films from a C-Mag Cylindrical Source | Peter Sieck - Academia.edu
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